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مکانیک::
لیتوگرافی نوری
Silicon wafers are firstly coated with photoresist and undergo a photolithography step to generate a set of pattern on Lhe surface of the wafer [ 19, 203.
Indirect methods are photolithography, hot embossing, casting and moulding as Lhey all consist of
2J Photolithography and Mask Design
Photolithography is a keystone in the fabrication of microelectronics and microelectromechanical systems (MEMS).
Fig. 3.3 Illustration of [ he method of photolithography using SU-8 photoresist.
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