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مکانیک::
پلی سیلیکون
The pump has check valves made of polysilicon by using surface micromachining.
is a disc supported by four thin polysilicon beams.
( e ) polysilicon disc valve; ( f) and ( g ) silicon cantilever check valve; and ( h ), fi), and (j) ring mesa check valve.
static actuators [52], The polysilicon electrodes are embedded in silicon nitride.
The membrane has an additional polysilicon layer acting as the ground electrode.
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