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thermopile, which multiplies the thermoelectric coefficient by the number of thermocouples.
Thermopiles are used for measuring the heater temperature in hot-film mode.
The cooling of the heater for a constant heating power can be evaluated directly with the thermopile output.
The sensor presented in [28] has aluminum /polysilieon thermopiles whose hot junctions are placed next to the heater The whole structure is suspended on a cantilever [ Figure 8 A 5(a)].
thermopile output is used in the example of [29] to control the heating current, which is connected to a sigma-delta converter.
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