3
مکانیک::
محرک، فعال کننده
The most important actuation principles are discussed in Chapter 6, Thus, in this chapter micropumps are categorized according to their pumping principles.
where Pacmator *s the input power of the actuator.
The same valves were also used in the pumps reported in [29], which have thermopileLimatic actuators instead of
The pump uses an external piezoelectric actuator, which can deliver a large
The pump utilizes an integrated electrostatic actuator, which has a 5-|Jjn gap between the electrodes and requires a peak actuation voltage of 200V, If the pump frequency is higher than the resonance frequency of the flap valves, the pump is able to pump backward.،
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