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مکانیک::
عضو انعطاف پذیر
Figure 7.35 depicts the conventional design of a flexural actuating membrane The thin membrane consists of sil- icon nitride, zinc oxide, and aluminum.
The valve depicted in Figure 6.7 uses a polysilicon heater on a membrane, which is suspended on four flexures [4 ].
The flexural rigidity of the beam (� /)beam is*
The valve seat is suspended on four flexures.
Each flexure is 500 ]im long and 200|im wide.
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