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4.2 Micropumps and MicroChannel Flow
The next active components of a microfluidic system are micropumps With the growing importance of genomics, proteomics, and the discovery of new 'drugs, controlled transport of fluids in microscale becomes an important and crucial task.
Overviews on micropumps were reported in several excellent review papers, Gmvesen et al. gave a general overview on fluidic problems in the microscale [ 1 ].
Shoji and Esaslu discussed microfluidics from the device point of view, and considered micropumps, microvalves, and flow sensors [2], This chapter only deals with micropumps, and discusses their design considerations as well as the published design examples.
In contrast to other MEMS devices, micropumps are one of [ he components with the largest variety of operating principles.
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