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مکانیک::
محرک الکترواستاتیک
The pump utilizes an integrated electrostatic actuator, which has a 5-|Jjn gap between the electrodes and requires a peak actuation voltage of 200V, If the pump frequency is higher than the resonance frequency of the flap valves, the pump is able to pump backward.
The pump reported by Cabuz el aL increases the compression ratio to 10 by using curved pump chambers and flexible plastic pump membrane for electrostatic actuation [56].
Electrostatic actuators allow a fast operation frequency of 100 Hz, which is almost two orders
The energy density stored in electrostatic actuators can be calculated based on the energy
electrostatic actuators and piezoelectric material for piezoelectric actuators), = 8,85418 x 10"
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